A MEMS device incorporates a
micro-electromechanical capacitive element into the sensor that utilizes
2 parallel plate electrodes, 1 stationary and 1 attached to a
spring-mass system. Movement causes acceleration that produces
deflection in the non-stationary electrode. This results in a measurable
change in the capacitance between the 2 plates that is proportional to
the angle of deflection. All measured values and parameters are
accessible via the object directory. The micro board design in the MEMS
technology provides a compact, precise inclinometer.
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